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Scope of IWAPS Paper

IWAPS is devoted to publishing research on the cutting-edge microelectronic manufacturing technology. The scope of the conference covers studies of advanced semiconductor manufacturing sciences and technologies from early stage theories and experiments to industrial high volume manufacturing applications. The perspective scope includes, but is not limited to the following areas:

1. Process
2. Computational Lithography and DTCO
3. Materials
4. Masks
5. Metrology and Inspection
6. Emerging Patterning Technologies
7. Lithography Equipment
8. Others

Abstract Instructions

The abstract must clearly describe the nature, scope, content, organization, key points and significance of the proposed paper.

The ABSTRACT must include paper title, key words, author name, affiliation and full contact information (email and address). The Word of Abstract limit is up to 500 words. Introductory paragraph describing the intended content of your conference is a huge plus to your papers. Graphs are highly encouraged in the submitted abstract. (ABSTARCT TEMPLATE)

Deadline: 30-June, 2026.

Abstracts submitted after the published deadline will be considered on a case-by-case basis. Please submit the ABSTRACT to SPIE website

 (https://spie.org/submissions/submit/overview.aspx?EventId=4101554) .

Notification of acceptance data: 21-July, 2026.

Full Text

After the abstract is accepted, the author needs to submit the final paper in accordance with the requirements of the full-text template. The full text of the paper should be submitted by authors through SPIE submission system. (https://spie.org/submissions/submit/overview.aspx?EventId=4101554) 

For any questions during submission, please contact us through iwaps_program@ime.ac.cn.

Full paper submission date: 31-Aug., 2026.

Papers of this conference will be submitted to SPIE Digital Library and EI for examination. Please be sure to submit the full text before the deadline. Otherwise, it will not be submitted for examination. Please refer to the template format.

(ProcSPIETemplate_A4)

SPIE Manuscript Specifications: https://spie.org/conferences-and-exhibitions/spie-manuscript-submissions-guidelines

SPIE journals welcome submissions of journal-ready manuscripts derived from conference proceedings papers, as appropriate for each SPIE journal, and a link to the SPIE Journals policy: https://www.spiedigitallibrary.org/journals/journal-authors

Presentation Instructions

For oral presenters:

Authors of papers selected for oral presentation shall attend IWAPS 2026 and give a 15 minutes technical overview presentation about your paper. Speakers are responsible for providing a PPT in advance to be uploaded for presentation at the conference. The PPT Due is August 31st 2026. Please send PPT to iwaps_program@ime.ac.cn before the due date.

For poster presenters:

Poster Size: should not exceed 0.8m (width) *1.2m (height)

Present your poster in person: Each poster presenter is responsible for printing their poster and bringing it to the meeting. SPIE and IWAPS does not print the posters.